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[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - A new highly selective sacrificial layer technology for SiC MEMS
Behnel, N., Fuchs, T., Seidel, H.Year:
2009
Language:
english
DOI:
10.1109/SENSOR.2009.5285888
File:
PDF, 1.45 MB
english, 2009