A Hybrid MEMS–Fiber Optic Tunable Fabry–Perot Filter

Journal of Microelectromechanical Systems 2010 / 04 Vol. 19; Iss. 2

A Hybrid MEMS–Fiber Optic Tunable Fabry–Perot Filter

Hays, David, Zribi, Anis, Chandrasekaran, Shankar, Goravar, Shivappa, Maity, Sandip, Douglas, Leonard R., Hsu, Kevin, Banerjee, Ayan
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Volume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2009.2038351
Date:
April, 2010
File:
PDF, 1.03 MB
english, 2010
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