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[IEEE 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. - San Jose, CA, USA (8-10 Oct. 2001)] 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203) - Managing, measuring and improving equipment capacity and overall equipment efficiency (OEE) using iPLUS
Killeen, D., Gaboury, P., Paccard, D.Year:
2001
Language:
english
DOI:
10.1109/ISSM.2001.962906
File:
PDF, 527 KB
english, 2001