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[IEEE 2010 2nd Asia Symposium on Quality Electronic Design (ASQED 2010) - Penang, Malaysia (2010.08.3-2010.08.4)] 2nd Asia Symposium on Quality Electronic Design (ASQED) - Dry etching process using XeF2 on microhotplate device
Tardan, Z., Halim, Z. AbdulYear:
2010
Language:
english
DOI:
10.1109/ASQED.2010.5548217
File:
PDF, 1.42 MB
english, 2010