[IEEE Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004. - Nagoya, Japan (Oct. 31-Nov. 3, 2004)] Micro-Nanomechatronics and Human Science, 2004 and The Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2004. - In-situ measurements of internal stresses in copper thin films during thermal cycling using synchrotron X-rays
Tanaka, K., Akiniwa, Y.Year:
2004
Language:
english
DOI:
10.1109/MHS.2004.1421279
File:
PDF, 786 KB
english, 2004