Design, Fabrication, and Characterization of Thermally...

Journal of Microelectromechanical Systems 2004 / 08 Vol. 13; Iss. 4

Design, Fabrication, and Characterization of Thermally Actuated Probe Arrays for Dip Pen Nanolithography

Bullen, D., Wang, X., Zou, J., Chung, S.-W., Mirkin, C.A., Liu, C.
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Volume:
13
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2004.828738
Date:
August, 2004
File:
PDF, 1.64 MB
english, 2004
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