[IEEE 1999 IEEE Hong Kong Electron Devices Meeting - Shatin, Hong Kong (26 June 1999)] Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458) - Atomistic simulations of interconnect metallization
Hanchen Huang,, Gilmer, G.H.Year:
1999
Language:
english
DOI:
10.1109/HKEDM.1999.836418
File:
PDF, 158 KB
english, 1999