[IEEE 1999 IEEE Hong Kong Electron Devices Meeting -...

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[IEEE 1999 IEEE Hong Kong Electron Devices Meeting - Shatin, Hong Kong (26 June 1999)] Proceedings 1999 IEEE Hong Kong Electron Devices Meeting (Cat. No.99TH8458) - Atomistic simulations of interconnect metallization

Hanchen Huang,, Gilmer, G.H.
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Year:
1999
Language:
english
DOI:
10.1109/HKEDM.1999.836418
File:
PDF, 158 KB
english, 1999
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