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[IEEE 2012 IEEE International Conference on Automation Science and Engineering (CASE 2012) - Seoul, Korea (South) (2012.08.20-2012.08.24)] 2012 IEEE International Conference on Automation Science and Engineering (CASE) - Dispatching of lots to dynamically reduce the wafers at risk in semiconductor manufacturing
Rodriguez-Verjan, Gloria, Tartiere, Eric, Pinaton, Jacques, Dauzere-Peres, Stephane, Thieullen, AlexisYear:
2012
Language:
english
DOI:
10.1109/CoASE.2012.6386374
File:
PDF, 504 KB
english, 2012