[IEEE 1995 International Semiconductor Conference. CAS '95 - Sinaia, Romania (11-14 Oct. 1995)] 1995 International Semiconductor Conference. CAS '95 Proceedings - LPCVD silicon oxynitride from dichlorosilane, nitrous oxide and ammonia
Modreanu, M., Cosmin, P.Year:
1995
Language:
english
DOI:
10.1109/SMICND.1995.494927
File:
PDF, 424 KB
english, 1995