[IEEE 1995 International Semiconductor Conference. CAS '95...

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[IEEE 1995 International Semiconductor Conference. CAS '95 - Sinaia, Romania (11-14 Oct. 1995)] 1995 International Semiconductor Conference. CAS '95 Proceedings - LPCVD silicon oxynitride from dichlorosilane, nitrous oxide and ammonia

Modreanu, M., Cosmin, P.
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Year:
1995
Language:
english
DOI:
10.1109/SMICND.1995.494927
File:
PDF, 424 KB
english, 1995
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