[Ultra Clean Soc ISSM2000. Ninth International Symposium on Semiconductor Manufacturing - Tokyo, Japan (26-28 Sept. 2000)] Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) - International reuse program in a green field Fab
Grinshpan, A., Lavi, G.Year:
2000
Language:
english
DOI:
10.1109/ISSM.2000.993653
File:
PDF, 449 KB
english, 2000