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[IEEE 2003 IEEE International Conference on Robotics and Automation (Cat No 03CH37422) SOI-03) - Newport Beach, CA, USA (2003.10.2-2003.10.2)] 2003 IEEE International Conference on Robotics and Automation (Cat No 03CH37422) SOI-03) - Systematic study of the splitting kinetic of H/He co-implanted substrate
Phuong Nguyen,, Cayrefourcq,, Blondeau,, Sousbie,, Lagahe-Blanchard,, Sartori,, Cartier,Year:
2003
Language:
english
DOI:
10.1109/SOI.2003.1242926
File:
PDF, 167 KB
english, 2003