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[IEEE 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology (AISOMT) - Harbin, China (2011.10.12-2011.10.16)] 2011 Academic International Symposium on Optoelectronics and Microelectronics Technology - Pinch dynamics of the 13.5 nm EUV-emitting plasma in a LA-DPP source
Zhu, Qiushi, Yamada, Junzaburo, Kishi, Nozomu, Hosokai, Tomonao, Watanabe, Masato, Okino, Akitoshi, Horioka, Kazuhiko, Hotta, EikiYear:
2011
Language:
english
DOI:
10.1109/AISMOT.2011.6159346
File:
PDF, 1.82 MB
english, 2011