Optimal design and noise consideration of micromachined...

Optimal design and noise consideration of micromachined vibrating rate gyroscope with modulated integrative differential optical sensing

Degani, O., Seter, D.J., Socher, E., Kaldor, S., Nemirovsky, Y.
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Volume:
7
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.709652
Date:
January, 1998
File:
PDF, 413 KB
english, 1998
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