Development and Active Disturbance Rejection Control of a Compliant Micro-/Nanopositioning Piezostage With Dual Mode
Tang, Hui, Li, YangminVolume:
61
Language:
english
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/TIE.2013.2258305
Date:
March, 2014
File:
PDF, 2.20 MB
english, 2014