[IEEE 2007 13th International Workshop on Thermal Investigation of ICs and Systems (THERMINIC) - Budapest, Hungary (2007.09.17-2007.09.19)] 2007 13th International Workshop on Thermal Investigation of ICs and Systems (THERMINIC) - Micro-hotplates for thermal characterisation of structural materials of MEMS
Furjes, P., Csikvari, P., Barsony, I., Ducso, Cs.Year:
2007
Language:
english
DOI:
10.1109/THERMINIC.2007.4451774
File:
PDF, 1.05 MB
english, 2007