Enhancement of Temperature Sensitivity for...

IEEE Sensors Journal 2006 / 12 Vol. 6; Iss. 6

Enhancement of Temperature Sensitivity for Metal–Oxide–Semiconductor (MOS) Tunneling Temperature Sensors by Utilizing Hafnium Oxide $(\hbox{HfO}_{2})$ Film Added on Silicon Dioxide $(\hbox{SiO}_{2})$

Wang, Tsung-Miau, Chang, Chia-Hua, Hwu, Jenn-Gwo
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Volume:
6
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2006.884424
Date:
December, 2006
File:
PDF, 282 KB
english, 2006
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