Development of Rotary Work Table with Constant-Flow...

Advanced Materials Research 2014 / 9 Vol. 1017

Development of Rotary Work Table with Constant-Flow Hydrostatic Water Bearing for Large Scale Silicon-Wafer Grinding Machine

Okahata, Go, Yui, Akinori, Kitajima, Takayuki, Okuyama, Shigeki, Saito, Hirotsugu, Slocum, Alexander Henry
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Volume:
1017
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.1017.604
Date:
September, 2014
File:
PDF, 488 KB
english, 2014
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