High-Resolution MEMS Inclinometer Based on Pull-In Voltage

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Journal of Microelectromechanical Systems 2014

High-Resolution MEMS Inclinometer Based on Pull-In Voltage

Alves, Filipe Serra, Dias, Rosana Alves, Cabral, Jorge Miguel, Gaspar, Joao, Rocha, Luis Alexandre
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Year:
2014
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2359633
File:
PDF, 4.98 MB
english, 2014
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