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[IEEE 2009 IEEE Nanotechnology Materials and Devices Conference (NMDC) - Traverse City, MI, USA (2009.06.2-2009.06.5)] 2009 IEEE Nanotechnology Materials and Devices Conference - Material characterization and process modeling issues of high-k dielectrics for FET applications
Jung Han Kang,, Kim, Chang Eun, Kim, Myoung-Seok, Myoung, Jae-Min, Yun, IlguYear:
2009
Language:
english
DOI:
10.1109/NMDC.2009.5167580
File:
PDF, 561 KB
english, 2009