[IEEE SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest - Cambridge, MA, USA (8-10 Sept. 1997)] SISPAD '97. 1997 International Conference on Simulation of Semiconductor Processes and Devices. Technical Digest - Capacitive detection method evaluation for silicon accelerometer by physical parameter extraction from finite element simulations
Ansel, Y., Romanowicz, B., Laudon, M., Renaud, P., Schropfer, G.Year:
1997
Language:
english
DOI:
10.1109/SISPAD.1997.621353
File:
PDF, 479 KB
english, 1997