Degradation of insulators in Silicon Selective Epitaxial...

IEEE Electron Device Letters 1995 / 09 Vol. 16; Iss. 9

Degradation of insulators in Silicon Selective Epitaxial Growth (SEG) ambient

Bashir, R., Kim, S., Qadri, N., Jin, D., Neudeck, G.W., Denton, J.P., Yeric, G., Wu, K., Tasch, A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
16
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/55.406795
Date:
September, 1995
File:
PDF, 272 KB
english, 1995
Conversion to is in progress
Conversion to is failed