[IEEE IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005 - Nagoya University, Japan (Nov. 7, 2005)] IEEE International Symposium on Micro-NanoMechatronics and Human Science, 2005 - Design and fabrication of pyrolyzed polymer micro and nano structures
Naka, K., Konishi, S.Year:
2005
Language:
english
DOI:
10.1109/MHS.2005.1589971
File:
PDF, 1.53 MB
english, 2005