[IEEE IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems - Heidelberg, Germany (25-29 Jan. 1998)] Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176) - Silicon micromachined mass filter for a low power, low cost quadrupole mass spectrometer
Tullstall, J.J., Taylor, S., Syms, R.R.A., Tate, T., Ahmad, M.M.Year:
1998
Language:
english
DOI:
10.1109/MEMSYS.1998.659797
File:
PDF, 541 KB
english, 1998