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[IEEE 2006 7th International Conference on Electronic Packaging Technology - Shanghai, China (2006.08.26-2006.08.29)] 2006 7th International Conference on Electronic Packaging Technology - A Base Exciter for Dynamic Testing of MEMS on Wafer Level
Shi, Yanghe, Zhang, Honghai, Wang, Xuefang, Liu, ShengYear:
2006
Language:
english
DOI:
10.1109/ICEPT.2006.359769
File:
PDF, 2.97 MB
english, 2006