[IEEE 10th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP 2002 - Vancouver, BC, Canada (25-27 Sept. 2002)] 10th IEEE International Conference of Advanced Thermal Processing of Semiconductors - Systems analysis applied to modeling dopant activation and TED in rapid thermal annealing
Gunawan, R., Jung, M.Y.L., Braatz, R.D., Seebauer, E.G.Year:
2002
Language:
english
DOI:
10.1109/RTP.2002.1039447
File:
PDF, 237 KB
english, 2002