[IEEE IEEE International SOI Conference - Ponte Vedra Beach, FL (October 6-8, 1992)] IEEE International SOI Conference - Identification of Optimal Doses for Device Quality Thin-Film and Standard Simox Structures Formed by Low (50keV, 70keV or 90keV) or High (200keV) Energy Oxygen Implantation
Marsh, C.D., Booker, G.R., Nejim, A., Giles, L.F., Hemment, P.L.F., Li, Y., Chater, R.J., Kilner, J.A., Wainwright, S., Hall, S.Year:
1992
DOI:
10.1109/SOI.1992.664770
File:
PDF, 180 KB
1992