[IEEE Technical Digest MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems - Interlaken, Switzerland (21-25 Jan 2001)] Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) - Polyimide as the pedestal of batch fabricated micro-ball lens and micro-mushroom array
Yuh-Sheng Lin,, Cheng-Tang Pan,, Kun-Lung Lin,, Shih-Chou Chen,, Jauh-Jung Yang,, Jei-Pin Yang,Year:
2001
Language:
english
DOI:
10.1109/MEMSYS.2001.906547
File:
PDF, 299 KB
english, 2001