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[IEEE 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - Miami Beach, FL, USA (Jan. 30 - Feb. 3, 2005)] 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. - An improved performance poly Si pirani vacuum gauge using heat distributing structural supports
Mitchell, J., Lahiji, G.R., Najaft, K.Year:
2005
Language:
english
DOI:
10.1109/MEMSYS.2005.1453924
File:
PDF, 823 KB
english, 2005