Sputtering ZnO films on langasite and its saw properties

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2007 / 12 Vol. 54; Iss. 12

Sputtering ZnO films on langasite and its saw properties

Wu, Sean, Yan, Guo-jun, Lee, Maw-shung, Ro, Ruyen, Chen, K.
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Volume:
54
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/TUFFC.2007.559
Date:
December, 2007
File:
PDF, 475 KB
english, 2007
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