[IEEE 2006 International Semiconductor Conference - Sinaia, Romania (2006.09.27-2006.09.29)] 2006 International Semiconductor Conference - Characterization of Pulsed-Laser-Deposited Aln Films as a Gate Dielectric in Aln-Si Mis Structures
Simeonov, S., Bakalova, S., Kafedjiiska, E., Szekeres, A., Grigorescu, S., Popescu, A., Cojanu, C., Sima, F., Socol, G., Mihailescu, I.Year:
2006
Language:
english
DOI:
10.1109/SMICND.2006.283992
File:
PDF, 4.38 MB
english, 2006