[IEEE 2009 22nd International Vacuum Nanoelectronics Conference (IVNC) - Hamamatsu, Japan (2009.07.20-2009.07.24)] 2009 22nd International Vacuum Nanoelectronics Conference - Sythesis and research of nanophosphors of structure ZnS:Mn, ZnS:Cu, Cl and ZnS:Cu, Mn, Cl

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