[IEEE 2006 International Conference on Advanced Semiconductor Devices and Microsystems - Smolenice, Slovakia (2006.10.16-2006.10.18)] 2006 International Conference on Advanced Semiconductor Devices and Microsystems - Physical properties of transparent conductive oxides prepared by RF reactive sputtering
Tvarozek, V., Novotny, I., Sutta, P., Flickyngerova, S., Harmatha, L., Vavrinsky, E., Nigrovicova, M., Mullerova, J.Year:
2006
Language:
english
DOI:
10.1109/ASDAM.2006.331181
File:
PDF, 3.07 MB
english, 2006