![](/img/cover-not-exists.png)
A new method for treating fluorine wastewater to reduce sludge and running costs
Toyoda, A., Taira, T.Volume:
13
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.857940
Date:
January, 2000
File:
PDF, 133 KB
english, 2000