Symmetrical PolyMUMPs-Based Piezoresistive Microcantilever...

IEEE Sensors Journal 2008 / 05 Vol. 8; Iss. 5

Symmetrical PolyMUMPs-Based Piezoresistive Microcantilever Sensors With On-Chip Temperature Compensation for Microfluidics Applications

Tuantranont, Adisorn, Lomas, Tanom, Jaruwongrungsee, Kata, Jomphoak, Apichai, Wisitsoraat, Anurat
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Volume:
8
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2008.918981
Date:
May, 2008
File:
PDF, 1.50 MB
english, 2008
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