![](/img/cover-not-exists.png)
Static friction in polysilicon surface micromachines
Lumbantobing, A., Komvopoulos, K.Volume:
14
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2005.850719
Date:
August, 2005
File:
PDF, 1.89 MB
english, 2005