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Bulk-Like Laminated Nitride Metal/Semiconductor Superlattices for Thermoelectric Devices
Schroeder, Jeremy L., Ewoldt, David A., Amatya, Reja, Ram, Rajeev J., Shakouri, Ali, Sands, Timothy D.Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2013.2282743
Date:
June, 2014
File:
PDF, 1.39 MB
english, 2014