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[IEEE 1997 21st International Conference on Microelectronics. Proceedings - Nis, Yugoslavia (14-17 Sept. 1997)] 1997 21st International Conference on Microelectronics. Proceedings - Micromachined silicon sensor for tribological investigations
Vujanic, A., Delic, N., Panschitz, A., Detter, H., Simicic, N., Matic, M.Volume:
2
Year:
1997
Language:
english
DOI:
10.1109/ICMEL.1997.632896
File:
PDF, 541 KB
english, 1997