[IEEE 1992 Symposium on VLSI Technology Digest of Technical...

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[IEEE 1992 Symposium on VLSI Technology Digest of Technical Papers - Seattle, WA, USA (2-4 June 1992)] 1992 Symposium on VLSI Technology Digest of Technical Papers - Highly anisotropic microwave plasma etching for high packing density silicon patterns

Kure, T., Gotoh, Y., Kawakami, H., Tachi, S.
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Year:
1992
Language:
english
DOI:
10.1109/VLSIT.1992.200640
File:
PDF, 320 KB
english, 1992
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