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Selective Transfer Technology for Microdevice Distribution
Guerre, R., Drechsler, U., Jubin, D., Despont, M.Volume:
17
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2007.911370
Date:
February, 2008
File:
PDF, 1.10 MB
english, 2008