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[IEEE 2009 International Symposium on Optomechatronic Technologies (ISOT 2009) - Istanbul, Turkey (2009.09.21-2009.09.23)] 2009 International Symposium on Optomechatronic Technologies - Impact of angle ranges on thickness resolution in thin film reflectometry
Hirth, Florian, Rossner, Max, Jakobi, Martin, Koch, Alexander W.Year:
2009
Language:
english
DOI:
10.1109/ISOT.2009.5326107
File:
PDF, 1005 KB
english, 2009