[IEEE 2009 International Workshop on Junction Technology (IWJT) - Kyoto, Japan (2009.06.11-2009.06.12)] 2009 International Workshop on Junction Technology - Electron holography for 2-D dopant profiling
Gribelyuk, Michael A., Yuan, Jun, Gluschenkov, Oleg, Ronsheim, Paul, Huiling Shang,Year:
2009
Language:
english
DOI:
10.1109/IWJT.2009.5166222
File:
PDF, 1.35 MB
english, 2009