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Dual Discharge Modes Operation of an Argon Plasma Generated by Commercial Electronic Ballast for Remote Plasma Removal Process
Cho, Tae S., Sen, Yi-Heng, Bokka, Ramesh, Park, Soonam, Lubomirsky, Dima, Venkataraman, ShankarVolume:
42
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2014.2321172
Date:
June, 2014
File:
PDF, 805 KB
english, 2014