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[IEEE 28th Annual on Reliability Physics Symposium - New Orleans, LA, USA (27-29 March 1990)] 28th Annual Proceedings on Reliability Physics Symposium - Effects of residual water in spin-on-glass layer on void formation for multilevel interconnections
Hirashita, N., Aikawa, I., Ajioka, T., Kobayakawa, M., Yokoyama, F., Sakaya, Y.Year:
1990
DOI:
10.1109/RELPHY.1990.66089
File:
PDF, 424 KB
1990