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[IEEE 2007 International Symposium on Micro-NanoMechatronics and Human Science - Nagoya, Japan (2007.11.11-2007.11.14)] 2007 International Symposium on Micro-NanoMechatronics and Human Science - Novel Wet Anisotropic Etching Process for the Realization of New Shapes of Silicon MEMS Structures

Pal, Prem, Sato, Kazuo, Gosalvez, Miguel A., Shikida, Mitsuhiro
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Year:
2007
Language:
english
DOI:
10.1109/MHS.2007.4420906
File:
PDF, 2.71 MB
english, 2007
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