[IEEE 2008 IEEE International Conference on Microelectronic Test Structure (ICMTS) - Edinburgh, UK (2008.03.24-2008.03.27)] 2008 IEEE International Conference on Microelectronic Test Structures - Influence of STI stress on drain current matching in advanced CMOS
Wils, Nicole, Tuinhout, Hans, Meijer, MauriceYear:
2008
Language:
english
DOI:
10.1109/ICMTS.2008.4509345
File:
PDF, 601 KB
english, 2008