High-performance ZnO thin-film transistor fabricated by...

Semiconductor Science and Technology 2011 / 08 Vol. 26; Iss. 8

High-performance ZnO thin-film transistor fabricated by atomic layer deposition

Oh, Byeong-Yun, Kim, Young-Hwan, Lee, Hee-Jun, Kim, Byoung-Yong, Park, Hong-Gyu, Han, Jin-Woo, Heo, Gi-Seok, Kim, Tae-Won, Kim, Kwang-Young, Seo, Dae-Shik
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Volume:
26
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/26/8/085007
Date:
August, 2011
File:
PDF, 735 KB
english, 2011
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