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Infrared emitting nanostructures for highly efficient microhotplates
Müller, L, Käpplinger, I, Biermann, S, Brode, W, Hoffmann, MartinVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035014
Date:
March, 2014
File:
PDF, 2.64 MB
english, 2014