[IEEE 2008 IEEE International Reliability Physics Symposium (IRPS) - Phoenix, AZ, USA (2008.04.27-2008.05.1)] 2008 IEEE International Reliability Physics Symposium - TDDB robustness of highly dense 65NM BEOL vertical natural capacitor with competitive area capacitance for RF and mixed-signal applications
Fischer, A.H., Lim, Y.K., Riess, Ph., Pompl, Th., Zhang, B.C., Chua, E.C., Keller, W.W., Tan, J.B., Klee, V., Tan, Y.C., Souche, D., Sohn, D.K., von Glasow, A.Year:
2008
Language:
english
DOI:
10.1109/relphy.2008.4558873
File:
PDF, 2.20 MB
english, 2008