Wafer-Scale Manufacturing of Bulk Shape-Memory-Alloy Microactuators Based on Adhesive Bonding of Titanium–Nickel Sheets to Structured Silicon Wafers
Braun, Stefan, Sandstrom, Niklas, Stemme, GÖran, van der Wijngaart, WouterVolume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2009.2035368
Date:
December, 2009
File:
PDF, 1.05 MB
english, 2009