[IEEE 2013 Joint IEEE Int'l Symp on Applications of Ferroelectrics & Workshop on Piezoresponse Force Microscopy (ISAF/PFM) - Prague 4, Czech Republic (2013.07.21-2013.07.25)] 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM) - PLD elaboration of piezoelectric ZnO thin film for 540 MHz Al/ZnO/Pt bulk acoustic wave resonator

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